THE EFFECT OF PHOSPHORUS ION-IMPLANTATION ON MOLYBDENUM-SILICON CONTACTS

被引：28

作者：

CHIANG, SW ^{[1
]}

CHOW, TP ^{[1
]}

REIHL, RF ^{[1
]}

WANG, KL ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,LOS ANGELES,CA 90027

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 06期

关键词：

D O I：

10.1063/1.329268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4027 / 4032

页数：6

共 17 条

[1] METALLURGICAL BOUNDARY PROPERTIES AND ELECTROPHYSICAL PROPERTIES OF MOLYBDENUM-SILICON JUNCTIONS
ALEKSANDROV, LN
GERSHINSKII, AE
LOVYAGIN, RN
SIMONOV, PA
FOMIN, BI
CHEREPOV, EI
[J]. THIN SOLID FILMS, 1977, 45 (01) : 87 - 93
[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON
BOWER, RW
MAYER, JW
[J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &
[3] SILICIDE FORMATION BY HIGH-DOSE SI+-ION IMPLANTATION OF PD
CHAPMAN, GE
LAU, SS
MATTESON, S
MAYER, JW
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) : 6321 - 6327
[4] REACTION-KINETICS OF MOLYBDENUM THIN-FILMS ON SILICON(111) SURFACE
GUIVARCH, A
AUVRAY, P
BERTHOU, L
LECUN, M
BOULET, JP
HENOC, P
PELOUS, G
MARTINEZ, A
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) : 233 - 237
[5] NIOBIUM SILICIDE FORMATION INDUCED BY AR-ION BOMBARDMENT
KANAYAMA, T
TANOUE, H
TSURUSHIMA, T
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 222 - 224
[6] ALLOYING OF THIN PALLADIUM FILMS WITH SINGLE-CRYSTAL AND AMORPHOUS SILICON
LEE, DH
HART, RR
KIEWIT, DA
MARSH, OJ
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 15 (02): : 645 - 651
[7] ION-INDUCED SILICIDE FORMATION IN NIOBIUM THIN-FILMS
MATTESON, S
ROTH, J
NICOLET, MA
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 42 (3-4): : 217 - 226
[8] SILICIDE FORMATION IN THIN MOLYBDENUM AND TUNGSTEN FILMS ON SINGLE-CRYSTAL SILICON SUBSTRATES AT RELATIVELY LOW-TEMPERATURES
OERTEL, B
SPERLING, R
[J]. THIN SOLID FILMS, 1976, 37 (02) : 185 - 194
[9] REFRACTORY-METAL SILICIDE FORMATION INDUCED BY AS+ IMPLANTATION
TSAI, MY
PETERSSON, CS
DHEURLE, FM
MANISCALCO, V
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (03) : 295 - 298
[10] INERT-GAS-BUBBLE FORMATION IN THE IMPLANTED METAL-SI SYSTEM
TSAUR, BY
LIAU, ZL
MAYER, JW
SHENG, TT
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 3978 - 3984

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