THE EFFECT OF PHOSPHORUS ION-IMPLANTATION ON MOLYBDENUM-SILICON CONTACTS

被引:28
作者
CHIANG, SW [1 ]
CHOW, TP [1 ]
REIHL, RF [1 ]
WANG, KL [1 ]
机构
[1] UNIV CALIF LOS ANGELES,LOS ANGELES,CA 90027
关键词
D O I
10.1063/1.329268
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4027 / 4032
页数:6
相关论文
共 17 条
  • [1] METALLURGICAL BOUNDARY PROPERTIES AND ELECTROPHYSICAL PROPERTIES OF MOLYBDENUM-SILICON JUNCTIONS
    ALEKSANDROV, LN
    GERSHINSKII, AE
    LOVYAGIN, RN
    SIMONOV, PA
    FOMIN, BI
    CHEREPOV, EI
    [J]. THIN SOLID FILMS, 1977, 45 (01) : 87 - 93
  • [2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON
    BOWER, RW
    MAYER, JW
    [J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &
  • [3] SILICIDE FORMATION BY HIGH-DOSE SI+-ION IMPLANTATION OF PD
    CHAPMAN, GE
    LAU, SS
    MATTESON, S
    MAYER, JW
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) : 6321 - 6327
  • [4] REACTION-KINETICS OF MOLYBDENUM THIN-FILMS ON SILICON(111) SURFACE
    GUIVARCH, A
    AUVRAY, P
    BERTHOU, L
    LECUN, M
    BOULET, JP
    HENOC, P
    PELOUS, G
    MARTINEZ, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) : 233 - 237
  • [5] NIOBIUM SILICIDE FORMATION INDUCED BY AR-ION BOMBARDMENT
    KANAYAMA, T
    TANOUE, H
    TSURUSHIMA, T
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 222 - 224
  • [6] ALLOYING OF THIN PALLADIUM FILMS WITH SINGLE-CRYSTAL AND AMORPHOUS SILICON
    LEE, DH
    HART, RR
    KIEWIT, DA
    MARSH, OJ
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 15 (02): : 645 - 651
  • [7] ION-INDUCED SILICIDE FORMATION IN NIOBIUM THIN-FILMS
    MATTESON, S
    ROTH, J
    NICOLET, MA
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 42 (3-4): : 217 - 226
  • [8] SILICIDE FORMATION IN THIN MOLYBDENUM AND TUNGSTEN FILMS ON SINGLE-CRYSTAL SILICON SUBSTRATES AT RELATIVELY LOW-TEMPERATURES
    OERTEL, B
    SPERLING, R
    [J]. THIN SOLID FILMS, 1976, 37 (02) : 185 - 194
  • [9] REFRACTORY-METAL SILICIDE FORMATION INDUCED BY AS+ IMPLANTATION
    TSAI, MY
    PETERSSON, CS
    DHEURLE, FM
    MANISCALCO, V
    [J]. APPLIED PHYSICS LETTERS, 1980, 37 (03) : 295 - 298
  • [10] INERT-GAS-BUBBLE FORMATION IN THE IMPLANTED METAL-SI SYSTEM
    TSAUR, BY
    LIAU, ZL
    MAYER, JW
    SHENG, TT
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 3978 - 3984