PREPARATION AND PROPERTIES OF TANTALUM THIN-FILMS

被引：85

作者：

BAKER, PN ^{[1
]}

机构：

[1] EDWARDS HIGH VACUUM INT,CENT RES LAB,ION BEAM SYST,CRAWLEY,SUSSEX,ENGLAND

来源：

THIN SOLID FILMS | 1972年 / 14卷 / 01期

关键词：

D O I：

10.1016/0040-6090(72)90365-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3 / 25

页数：23

共 82 条

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