DEFECTS IN SIO2 IN BURIED-OXIDE STRUCTURES FORMED BY O+ IMPLANTATION

被引：4

作者：

BARKLIE, RC ^{[1
]}

ENNIS, TJ ^{[1
]}

HEMMENT, PLF ^{[1
]}

REESON, K ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 32卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90251-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：433 / 436

页数：4

共 18 条

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