SATURATION OF RADIATION-INDUCED THRESHOLD-VOLTAGE SHIFTS IN THIN-OXIDE MOSFETS AT 80-K

被引:7
作者
KLEIN, RB [1 ]
SAKS, NS [1 ]
SHANFIELD, Z [1 ]
机构
[1] USN, RES LAB, WASHINGTON, DC 20375 USA
关键词
D O I
10.1109/23.101178
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Hole trapping in thin-oxide MOSFETs at 80 K is examined. The existing “field-collapse” model accurately predicts saturation of the hole trapping in a 26 nm oxide, but overestimates the saturation by a factor of two in a 9.5 nm oxide. A revised model, which incorporates recombination of electrons with previously trapped holes, improves the fit between the model and the data. © 1990 IEEE
引用
收藏
页码:1690 / 1695
页数:6
相关论文
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