THE DEVELOPMENT OF NON-UNIFORM DEPOSITION OF HOLES IN GATE OXIDES

被引：12

作者：

FREITAG, RK ^{[1
]}

BURKE, EA ^{[1
]}

DOZIER, CM ^{[1
]}

BROWN, DB ^{[1
]}

机构：

[1] MISSION RES CORP,NASHUA,NH 03062

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1988年 / 35卷 / 06期

关键词：

' This work has been supported by the Defense Nuclear Agency through its Basic Mechanisms and Hardness Assurance programs;

D O I：

10.1109/23.25440

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1203 / 1207

页数：5

共 17 条

[1] MOSFET AND MOS CAPACITOR RESPONSES TO IONIZING-RADIATION [J].

BENEDETTO, JM ;

BOESCH, HE .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1984, 31 (06) :1461-1466

[2] THERMAL ANNEALING OF RADIATION-INDUCED DEFECTS - A DIFFUSION-LIMITED PROCESS [J].

BROWN, DB ;

MA, DI ;

DOZIER, CM ;

PECKERAR, MC .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (06) :4059-4063

[3] THE PHENOMENON OF ELECTRON ROLLOUT FOR ENERGY DEPOSITION AND DEFECT GENERATION IN IRRADIATED MOS DEVICES [J].

BROWN, DB .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1986, 33 (06) :1240-1244

[4] IONIZING EVENTS IN SMALL DEVICE STRUCTURES [J].

BURKE, EA .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, 22 (06) :2543-2548

[5]

BURKE EA, 1981, IEEE T NUCL SCI, V28, P4068

[6] THE RESPONSE OF MOS DEVICES TO DOSE-ENHANCED LOW-ENERGY RADIATION [J].

FLEETWOOD, DM ;

WINOKUR, PS ;

LORENCE, LJ ;

BEEZHOLD, W ;

DRESSENDORFER, PV ;

SCHWANK, JR .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1986, 33 (06) :1245-1251

[7] GROWTH AND ANNEALING OF TRAPPED HOLES AND INTERFACE STATES USING TIME-DEPENDENT BIASES [J].

FREITAG, RK ;

DOZIER, CM ;

BROWN, DB .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1987, 34 (06) :1172-1177

[8] IONIC CLUSTERING AS A POSSIBLE SOURCE OF ERROR IN DETERMINING MOS C-V CHARACTERISTICS [J].

GALLOWAY, KF .

THIN SOLID FILMS, 1974, 23 (01) :S41-S44

[9] SIMPLE MODEL FOR SLOPE CHANGE OF C-V CURVES OF IRRADIATED MOS CAPACITORS [J].

GALLOWAY, KF .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) :964-965

[10]

KELLERER AM, 1969, 2ND P S MICR, P107

← 1 2 →