SPECTROSCOPIC ELLIPSOMETRY - A NEW TOOL FOR NONDESTRUCTIVE DEPTH PROFILING AND CHARACTERIZATION OF INTERFACES

被引：106

作者：

MCMARR, PJ

VEDAM, K

NARAYAN, J

机构：

[1] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC 27650

[2] N CAROLINA STATE UNIV,DEPT MAT ENGN,RALEIGH,NC 27650

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 03期

关键词：

D O I：

10.1063/1.336639

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：694 / 701

页数：8

相关论文

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