RELATIONSHIP BETWEEN SUBSTRATE BIAS AND MICROSTRUCTURE IN MAGNETRON-SPUTTERED AL-CU FILMS

被引：18

作者：

LIN, T

AHN, KY

HARPER, JME

MADAKSON, PB

FRYER, PM

机构：

来源：

THIN SOLID FILMS | 1987年 / 154卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(87)90354-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：81 / 89

页数：9

共 15 条

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[8] SIGNIFICANT IMPROVEMENT IN STEP COVERAGE USING BIAS SPUTTERED ALUMINUM [J].

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[9] THE INFLUENCE OF BIAS SPUTTERING AND WAFER PREHEATING ON THE STEP COVERAGE OF SPUTTERED ALUMINUM [J].

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[10]

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