OXYGEN EXPOSURE EFFECT ON SPUTTERING YIELD AND ANGULAR-DISTRIBUTION FOR LIGHT-ION IRRADIATION OF POLYCRYSTALLINE MOLYBDENUM

被引：12

作者：

SAIDOH, M

BAY, HL

BOHDANSKY, J

ROTH, J

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, D-5170 JULICH 1, FED REP GER

[2] FORSCHUNGSZENTRUM JULICH, INST PLASMA PHYS, D-5170 JULICH, FED REP GER

[3] MAX PLANCK INST PLASMA PHYS, D-8046 GARCHING, FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

ION BEAMS - RADIATION EFFECTS;

D O I：

10.1016/0168-583X(86)90537-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The sputtering yield of molybdenum and angular distribution of sputtered b molybdenum under oxygen exposure have been measured for D** plus - and **4He** plus -ion irradiation in the energy region from 2. 5 to 6 kev at ambient room temperature. The yields were determiend from the weight loss of the targets, whereas the angular distributions were determined with the aid of the collector technique.

引用

页码：403 / 407

页数：5

共 16 条

[1]

ANDERSEN HH, 1982, TOP APPL PHYS, V47, pCH4

[2] INVESTIGATION OF LIGHT-ION SPUTTERING OF TITANIUM USING LASER-INDUCED FLUORESCENCE [J].