DEPOSITION OF AMORPHOUS SINXH FILMS ON INP IN THE PRESENCE OF ASH3

被引:6
作者
COMMERE, B
HABRARD, MC
KRAWCZYK, SK
BRUYERE, JC
机构
关键词
D O I
10.1063/1.98973
中图分类号
O59 [应用物理学];
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页码:2142 / 2143
页数:2
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