BARRIER HEIGHTS AT THE POLYCRYSTALLINE SILICON-SIO2 INTERFACE

被引:19
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HICKMOTT, TW
ISAAC, RD
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10.1063/1.329122
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O59 [应用物理学];
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页码:3464 / 3475
页数:12
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[1]   HEAVILY DOPED SEMICONDUCTORS AND DEVICES [J].
ABRAM, RA ;
REES, GJ ;
WILSON, BLH .
ADVANCES IN PHYSICS, 1978, 27 (06) :799-892
[2]   INFRARED ABSORPTION IN HEAVILY DOPED N-TYPE SI [J].
BALKANSKI, M ;
AZIZA, A ;
AMZALLAG, E .
PHYSICA STATUS SOLIDI, 1969, 31 (01) :323-+
[3]   CARRIER MOBILITIES IN SILICON EMPIRICALLY RELATED TO DOPING AND FIELD [J].
CAUGHEY, DM ;
THOMAS, RE .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (12) :2192-+
[4]   CHARACTERISTICS OF P-DOPED POLYSILICON WITH B2H6 USED AS INSITU DOPANT SOURCE [J].
CHAPPELOW, RE ;
LIN, PT .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (06) :913-916
[5]   CHEMICAL VAPOR DEPOSITED POLYCRYSTALLINE SILICON. [J].
Cowher, M.E. ;
Sedgwick, T.O. .
1600, (119)
[6]   1 MU-M MOSFET VLSI TECHNOLOGY .7. METAL SILICIDE INTERCONNECTION TECHNOLOGY - FUTURE PERSPECTIVE [J].
CROWDER, BL ;
ZIRINSKY, S .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1979, 14 (02) :291-293
[7]   CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON [J].
DEAL, BE ;
SKLAR, M ;
GROVE, AS ;
SNOW, EH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (03) :266-+
[8]   DESIGN OF ION-IMPLANTED MOSFETS WITH VERY SMALL PHYSICAL DIMENSIONS [J].
DENNARD, RH ;
GAENSSLEN, FH ;
YU, HN ;
RIDEOUT, VL ;
BASSOUS, E ;
LEBLANC, AR .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1974, SC 9 (05) :256-268
[9]   SILICON GATE TECHNOLOGY [J].
FAGGIN, F ;
KLEIN, T .
SOLID-STATE ELECTRONICS, 1970, 13 (08) :1125-&
[10]  
FAGGIN F, 1970, P IEEE C RELIABILITY, V8, P35