THE ENHANCEMENT OF WEAR LIFE AND MOISTURE RESISTANCE OF SPUTTERED MOS2 FILMS BY METAL-ION IMPLANTATION

In the present paper, studies of the effects of metal ion (Y+, Ag+) implantation on the tribology and moisture resistance of r.f.-sputtered MoS2 films are reported. The scratch test indicates an improved film-substrate adherence. This is mainly attributed to the mixing interface which was caused by metal ion implantation. The tribological test results indicate that metal ion implantation improves the wear life of the sputtered MoS2 films in an atmosphere of 60-70% relative humidity (RH) by a factor of 2-3. However, it slightly increases the friction coefficient from 0.07 to 0.09. After being stored in an atmosphere of 100% RH for 120 h, Ag+-modified MoS2 films showed an increase in wear life by a factor of 8 compared with that of as-deposited MoS2 films stored under the same conditions. These results indicate that Ag implantation enhances the moisture resistance of the sputtered MoS2 films. The relationship between the chemical changes of the sputtered MoS2 films and their moisture resistance is also discussed.