SPUTTERED SIO2 DEPOSITED OVER A STEP

被引：16

作者：

STANDLEY, CL

JONES, RE

MAISSEL, LI

机构：

来源：

THIN SOLID FILMS | 1970年 / 5卷 / 5-6期

关键词：

D O I：

10.1016/0040-6090(70)90107-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：355 / &

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