HIGH-TEMPERATURE OPERATED ENHANCEMENT-TYPE BETA-SIC MOSFET

被引：10

作者：

FUMA, H

MIURA, A

TADANO, H

SUGIYAMA, S

TAKIGAWA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 11期

关键词：

D O I：

10.1143/JJAP.27.L2143

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L2143 / L2145

页数：3

共 10 条

[1] 3C-SIC P-N-JUNCTION DIODES [J].

FURUKAWA, K ;

UEMOTO, A ;

SHIGETA, M ;

SUZUKI, A ;

NAKAJIMA, S .

APPLIED PHYSICS LETTERS, 1986, 48 (22) :1536-1537

[2] HIGH-TEMPERATURE OPERATION OF SILICON-CARBIDE MOSFET [J].

KONDO, Y ;

TAKAHASHI, T ;

ISHII, K ;

HAYASHI, Y ;

SAKUMA, E ;

MISAWA, S ;

DAIMON, H ;

YAMANAKA, M ;

YOSHIDA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (02) :310-311

[3] EPITAXIAL-GROWTH OF BETA-SIC THIN-FILMS ON 6H ALPHA-SIC SUBSTRATES VIA CHEMICAL VAPOR-DEPOSITION [J].

KONG, HS ;

GLASS, JT ;

DAVIS, RF .

APPLIED PHYSICS LETTERS, 1986, 49 (17) :1074-1076

[4] TEMPERATURE-DEPENDENCE OF THE CURRENT-VOLTAGE CHARACTERISTICS OF METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS IN N-TYPE BETA-SIC GROWN VIA CHEMICAL VAPOR-DEPOSITION [J].

KONG, HS ;

PALMOUR, JW ;

GLASS, JT ;

DAVIS, RF .

APPLIED PHYSICS LETTERS, 1987, 51 (06) :442-444

[5]

MARSH OJ, 1973, SILICON CARBIDE 1973, P471

[6] PRODUCTION OF LARGE-AREA SINGLE-CRYSTAL WAFERS OF CUBIC SIC FOR SEMICONDUCTOR-DEVICES [J].

NISHINO, S ;

POWELL, JA ;

WILL, HA .

APPLIED PHYSICS LETTERS, 1983, 42 (05) :460-462

[7] INTERFACE STRUCTURES IN BETA-SILICON CARBIDE THIN-FILMS [J].

NUTT, SR ;

SMITH, DJ ;

KIM, HJ ;

DAVIS, RF .

APPLIED PHYSICS LETTERS, 1987, 50 (04) :203-205

[8] HIGH-TEMPERATURE DEPLETION-MODE METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS IN BETA-SIC THIN-FILMS [J].

PALMOUR, JW ;

KONG, HS ;

DAVIS, RF .

APPLIED PHYSICS LETTERS, 1987, 51 (24) :2028-2030

[9] FABRICATION OF INVERSION-TYPE N-CHANNEL MOSFETS USING CUBIC-SIC ON SI(100) [J].

SHIBAHARA, K ;

SAITO, T ;

NISHINO, S ;

MATSUNAMI, H .

IEEE ELECTRON DEVICE LETTERS, 1986, 7 (12) :692-693

[10]

SUZUKI A, 1986, 18TH C SOL STAT DEV

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