3-DIMENSIONAL SOLID-PHASE-EPITAXIAL REGROWTH FROM AS+-IMPLANTED SI

被引：24

作者：

HORIUCHI, M

TAMURA, M

AOKI, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 06期

关键词：

D O I：

10.1063/1.342835

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2238 / 2242

页数：5

共 10 条

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