BONDING AND ELECTRICAL-PROPERTIES OF BORON-DOPED MICROCRYSTALLINE SINX-H FILMS

被引：4

作者：

HASEGAWA, S

SEGAWA, M

KURATA, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 04期

关键词：

D O I：

10.1063/1.341746

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1931 / 1938

页数：8

共 31 条

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[9] AMORPHOUS SIN-H DIELECTRICS WITH LOW-DENSITY OF DEFECTS [J].

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[10] BONDING AND ELECTRONIC-STRUCTURES OF AMORPHOUS SINX-H [J].

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