HETEROEPITAXIAL GROWTH OF QUATERNARY BAXSR1-XTIO3 THIN-FILMS BY ARF EXCIMER-LASER ABLATION

被引：33

作者：

KOBAYASHI, H

KOBAYASHI, T

机构：

[1] Department of Electrical Engineering, Osaka University, Osaka, 560

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1994年 / 33卷 / 4A期

关键词：

FIELD-EFFECT TRANSISTOR (FET); SRTIO3; BAXSR1-XTIO3; FOURIER TRANSFORM INFRARED (FTIR); DIELECTRIC CONSTANT; EXCIMER LASER ABLATION;

D O I：

10.1143/JJAP.33.L533

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Highly polarizable BaxSr1-xTiO3 (X=0 approximately 1) (BSTO) thin films have been grown heteroepitaxially by the ArF excimer laser ablation method. They were characterized by X-ray diffraction, reflection high-energy electron diffraction (RHEED), capacitance-voltage (C-V), Fourier transform infrared (FTIR) and UV spectroscopic measurements, and x-dependent properties were studied systematically. The dielectric properties of the epitaxial BSTO films were consistent with data from ceramic bulk. However, the optical probes (FTIR and UV spectrometry) indicated the occurrence of microscopic composition fluctuation in the quaternary systems.

引用

页码：L533 / L536

页数：4

共 15 条

[1] EPITAXIAL-GROWTH OF SRTIO3 FILMS ON PT ELECTRODES AND THEIR ELECTRICAL-PROPERTIES
ABE, K
KOMATSU, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B): : 2985 - 2988
[2] METAL-INSULATOR-SUPERCONDUCTOR FIELD-EFFECT-TRANSISTOR USING SRTIO3 YBA2CU3OY HETEROEPITAXIAL FILMS
FUJII, T
SAKUTA, K
AWAJI, T
MATSUI, K
HIRANO, T
OGAWA, Y
KOBAYASHI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (5B): : L612 - L615
[3] HETEROEPITAXIAL GROWTH OF C-AXIS-ORIENTED BATIO3 THIN-FILMS WITH AN ATOMICALLY SMOOTH SURFACE
GONG, JP
KAWASAKI, M
FUJITO, K
TANAKA, U
ISHIZAWA, N
YOSHIMOTO, M
KOINUMA, H
KUMAGAI, M
HIRAI, K
HORIGUCHI, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (5A): : L687 - L689
[4] EPITAXIAL SRTIO3 THIN-FILMS GROWN BY ARF EXCIMER LASER DEPOSITION
HIRANO, T
FUJII, T
FUJINO, K
SAKUTA, K
KOBAYASHI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (4B): : L511 - L514
[5] STRONTIUM-TITANATE THIN-FILMS BY RAPID THERMAL-PROCESSING
JOSHI, PC
KRUPANIDHI, SB
[J]. APPLIED PHYSICS LETTERS, 1992, 61 (13) : 1525 - 1527
[6] SHORT-RANGE ORDERING IN PBMG1/3NB2/3O3
KRAUSE, HB
COWLEY, JM
WHEATLEY, J
[J]. ACTA CRYSTALLOGRAPHICA SECTION A, 1979, 35 (NOV): : 1015 - 1017
[7] INFLUENCE OF ELECTRIC-FIELDS ON PINNING IN YBA2CU3O7-DELTA FILMS
MANNHART, J
SCHLOM, DG
BEDNORZ, JG
MULLER, KA
[J]. PHYSICAL REVIEW LETTERS, 1991, 67 (15) : 2099 - 2101
[8] CORRELATION BETWEEN FOURIER-TRANSFORM-INFRARED (FTIR) SPECTRA AND TEMPERATURE-DEPENDENCE OF DIELECTRIC-PROPERTIES OF SRTIO3 THIN-FILMS
MATSUI, K
TAGA, M
KOBAYASHI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (6A): : L796 - L798
[9] STRUCTURAL BEHAVIOR IN THE SYSTEM (BA,CA,SR) TIO3 AND ITS RELATION TO CERTAIN DIELECTRIC CHARACTERISTICS
MCQUARRIE, M
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1955, 38 (12) : 444 - 449
[10] PERMITTIVITY OF STRONTIUM-TITANATE
NEVILLE, RC
MEAD, CA
HOENEISE.B
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) : 2124 - &

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