MODELING OF O-18 TRACER STUDIES OF THE OXYGEN REDISTRIBUTION DURING FORMATION OF SIO2 LAYERS BY HIGH-DOSE IMPLANTATION

被引:10
作者
JAGER, HU
KILNER, JA
CHATER, RJ
HEMMENT, PLF
PEART, RF
REESON, KJ
机构
[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,DEPT MAT,LONDON SW7 2BP,ENGLAND
[2] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND
关键词
D O I
10.1016/0040-6090(88)90265-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:333 / 342
页数:10
相关论文
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