MODELING OF O-18 TRACER STUDIES OF THE OXYGEN REDISTRIBUTION DURING FORMATION OF SIO2 LAYERS BY HIGH-DOSE IMPLANTATION

被引：10

作者：

JAGER, HU

KILNER, JA

CHATER, RJ

HEMMENT, PLF

PEART, RF

REESON, KJ

机构：

[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,DEPT MAT,LONDON SW7 2BP,ENGLAND

[2] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

THIN SOLID FILMS | 1988年 / 161卷

关键词：

D O I：

10.1016/0040-6090(88)90265-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：333 / 342

页数：10

共 17 条

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