ANALYSIS OF WEIGHTING FUNCTION IN TRANSIENT SPECTROSCOPY FOR PRECISE MEASUREMENT OF DEEP STATES

被引：3

作者：

KIDA, H

SAKITA, K

NOHDA, T

YAMAMOTO, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 01期

关键词：

D O I：

10.1143/JJAP.28.39

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：39 / 45

页数：7

共 16 条

[1] THEORETICAL ORIGINS OF NSS PEAKS OBSERVED IN GRAY-BROWN MOS STUDIES [J].

BOUDRY, MR .

APPLIED PHYSICS LETTERS, 1973, 22 (10) :530-531

[2] METAL-SEMICONDUCTOR BARRIER HEIGHT MEASUREMENT BY DIFFERENTIAL CAPACITANCE METHOD - 1 CARRIER SYSTEM [J].

GOODMAN, AM .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :329-&

[3] IMPROVED METHOD OF DETERMINING DEEP IMPURITY LEVELS AND PROFILES IN SEMICONDUCTORS [J].

GOTO, G ;

YANAGISAWA, S ;

WADA, O ;

TAKANASHI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (07) :1127-1133

[4] MEASUREMENT OF DEEP LEVELS IN HYDROGENATED AMORPHOUS-SILICON BY TRANSIENT VOLTAGE SPECTROSCOPY [J].

JOHNSON, NM .

APPLIED PHYSICS LETTERS, 1983, 42 (11) :981-983

[5] MEASUREMENT OF DEEP STATES IN UNDOPED AMORPHOUS-SILICON BY CURRENT TRANSIENT SPECTROSCOPY [J].

KIDA, H ;

HATTORI, K ;

OKAMOTO, H ;

HAMAKAWA, Y .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (12) :4079-4086

[6]

KLAUSMANN E, 1980, I PHYS C SER, V50, P97

[7] MEASUREMENT OF THE DENSITY OF GAP STATES IN HYDROGENATED AMORPHOUS-SILICON BY SPACE-CHARGE SPECTROSCOPY [J].

LANG, DV ;

COHEN, JD ;

HARBISON, JP .

PHYSICAL REVIEW B, 1982, 25 (08) :5285-5320

[8] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].

LANG, DV .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3023-3032

[9] DEPLETION-DISCHARGE TRANSIENT SPECTROSCOPY - DIRECT DETERMINATION OF THE DENSITY OF DEEP EMISSION STATES IN AMORPHOUS-SEMICONDUCTORS [J].

NAKAYAMA, Y ;

AKITA, S ;

KAWAMURA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (03) :L320-L322

[10] GAP STATES IN PHOSPHORUS-DOPED AMORPHOUS-SILICON STUDIED BY ISOTHERMAL CAPACITANCE TRANSIENT SPECTROSCOPY [J].

OKUSHI, H .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1985, 52 (01) :33-57

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