A TWO-DIMENSIONAL INTEGRATED PROCESS SIMULATOR - SPIRIT-I

被引:3
作者
OHGO, M
TAKANO, Y
MONIWA, A
YAMAMOTO, S
SAKAI, Y
MASUDA, H
SUNAMI, H
机构
关键词
D O I
10.1109/TCAD.1987.1270290
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:439 / 445
页数:7
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