共 18 条
- [2] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 349 - 354
- [3] ERDEMIR A, 1989, 44TH STLE ANN M ATL
- [4] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THE X-RAY MICROSTRUCTURE OF THIN SILVER FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2161 - 2166
- [6] SUMMARY ABSTRACT - CHARACTERIZATION OF ION-BEAM DEPOSITED DIAMONDLIKE CARBON COATING ON SEMICONDUCTORS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2327 - 2328
- [8] FRICTION-REDUCING COATINGS BY DUAL FAST ATOM BEAM TECHNIQUE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1986, 4 (06): : 2993 - 2996