CONTACT AND METALLIZATION PROBLEMS IN GAAS INTEGRATED-CIRCUITS

被引：31

作者：

BRASLAU, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573633

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3085 / 3090

页数：6

共 35 条

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