New perspectives on NBTI in advanced technologies: Modelling & characterization

被引:15
作者
Denais, M [1 ]
Huard, V [1 ]
Parthasarathy, C [1 ]
Ribes, G [1 ]
Perrier, F [1 ]
Roy, D [1 ]
Bravaix, A [1 ]
机构
[1] Crolles Alliance, F-38926 Crolles, France
来源
PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2005年
关键词
D O I
10.1109/ESSDER.2005.1546669
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work presents new perspectives of the NBTI in advanced technology. Both modelling and characterization of NBTI are investigated for the maturation of the reliability management in advanced node technologies. A physical-based V-T instability model is presented considering interface trapped charges, fixed charges and oxide trapped holes effects. Finally, we discuss on the lifetime concept in the case of recoverable NBTI-induced degradation.
引用
收藏
页码:399 / 402
页数:4
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