An experimental investigation on the nature of reverse current of silicon power pn-junctions

被引:26
作者
Obreja, VVN [1 ]
机构
[1] Inst Microtechnol, Bucharest 72996, Romania
关键词
high temperature; high voltage; junction passivation; leakage current; semiconductor device;
D O I
10.1109/TED.2002.1291850
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
At this time, little importance is given to the surface component of reverse leakage current of silicon pn-junctions although reliability issues reveal device blocking weakness when performing at high voltage and temperature. Junctions which have almost the same perimeter but different area have been realized and their reverse current has been measured at room temperature and high temperature both for standard recovery and fast recovery (gold-doped or electron irradiated) pn-junctions. It is shown that for standard recovery junctions the surface component of the, reverse current is the primary component from room temperature up to above 150 degreesC and has influence on reaching high permissible working voltages. For gold-doped or electron irradiated junctions, the bulk component is dominant at high junction temperature, but it is shown that a comparatively negligible surface component can impose lower reverse working voltages or lower junction operation temperature. The surface component may be a cause of limitation on the operation of power silicon diodes at high reverse voltage above 175-200 degreesC junction temperature.
引用
收藏
页码:155 / 163
页数:9
相关论文
共 14 条
[1]   DEPLETION LAYER CHARACTERISTICS AT SURFACE OF BEVELED HIGH-VOLTAGE P-N-JUNCTIONS [J].
BAKOWSKI, M ;
LUNDSTROM, KI .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (06) :550-563
[2]   COMPARISON OF GOLD, PLATINUM, AND ELECTRON-IRRADIATION FOR CONTROLLING LIFETIME IN POWER RECTIFIERS [J].
BALIGA, BJ ;
SUN, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (06) :685-688
[3]   TECHNOLOGY AND RELIABILITY OF THERMAL SIO2 LAYERS AS USED FOR PASSIVATING SILICON POWER DEVICES [J].
BLAHA, RE ;
FAHRNER, WR .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 50 (02) :551-562
[4]   DOUBLE POSITIVE BEVELING - BETTER EDGE CONTOUR FOR HIGH-VOLTAGE DEVICES [J].
CORNU, J ;
SCHWEITZER, S ;
KUHN, O .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1974, ED21 (03) :181-184
[5]   ANALYSIS OF BULK REVERSE CURRENT IN DIFFUSED SILICON POWER RECTIFIERS [J].
DANNHAUSER, F .
SOLID-STATE ELECTRONICS, 1967, 10 (04) :361-+
[6]   Dynamic avalanche in 3.3-kV Si power diodes [J].
Domeij, M ;
Breitholtz, B ;
Hillkirk, LM ;
Linnros, J ;
Östling, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (04) :781-786
[7]   DEGRADATION OF JUNCTION LEAKAGE IN DEVICES SUBJECTED TO GATE OXIDATION IN NITROUS-OXIDE [J].
MATHEWS, VK ;
MADDOX, RL ;
FAZAN, PC ;
ROSATO, J ;
HWANG, H ;
LEE, J .
IEEE ELECTRON DEVICE LETTERS, 1992, 13 (12) :648-650
[8]  
OBREJA V, 1997, P 7 EUR C POW EL APP
[9]  
Obreja VVN, 1998, CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2, P293, DOI 10.1109/SMICND.1998.732380
[10]   On the leakage current of present-day manufactured semiconductor junctions [J].
Obreja, VVN .
SOLID-STATE ELECTRONICS, 2000, 44 (01) :49-57