Differential pressure sensor using a piezoresistive cantilever

被引：107

作者：

Takahashi, Hidetoshi ^{[1
]}

Nguyen Minh Dung ^{[2
]}

Matsumoto, Kiyoshi ^{[1
]}

Shimoyama, Isao ^{[1
,2
]}

机构：

[1] Univ Tokyo, Informat & Robot Technol Res Initiat, Bunkyo Ku, Tokyo, Japan

[2] Univ Tokyo, Grad Sch Informat Sci & Technol, Dept Mechanoinformat, Bunkyo Ku, Tokyo, Japan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2012年 / 22卷 / 05期

关键词：

SILICON MICROPHONE;

D O I：

10.1088/0960-1317/22/5/055015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 mu m x 100 mu m x 0.3 mu m. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2 x 10 (4) Pa (1) and 0.02 Pa from -20 Pa to 20 Pa, respectively.

引用

页数：6

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