Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

被引：174

作者：

Sugioka, K ^{[1
]}

Cheng, Y ^{[1
]}

Midorikawa, K ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 81卷 / 01期

关键词：

D O I：

10.1007/s00339-005-3225-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined.

引用

页码：1 / 10

页数：10

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