Divacancy-tin complexes in electron-irradiated silicon studied by EPR

被引:27
作者
Fanciulli, M
Byberg, JR
机构
[1] Aarhus Univ, Inst Phys & Astron, DK-8000 Aarhus C, Denmark
[2] Aarhus Univ, Inst Chem, DK-8000 Aarhus C, Denmark
来源
PHYSICAL REVIEW B | 2000年 / 61卷 / 04期
关键词
D O I
10.1103/PhysRevB.61.2657
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
n- and p-type float-zone silicon containing 10(18)-cm(-3) tin were irradiated with 2 MeV electrons to a dose of 10(18) cm(-2) and subsequently examined by electron paramagnetic resonance (EPR). The p-type material yields only the well-known Si-G29 signal due to the tin-vacancy complex SnV0, whereas the as-irradiated n-type material in addition displays the Si-G7 signal (V-2(-)), DK4, recently assigned to SnV- in a set of slightly inequivalent configurations, and a new signal DK1, from a defects with S = 1/2 containing one tin nucleus. DK1, which we assign to (SnV-V)(-), undergoes a reversible triclinic-monoclinic transformation at approximate to 15 K. Annealing at 428 K removes Si-G29 and DK4 and produces a six-fold increase of Si-G7 and DK1, the kinetics indicating that about 50% of SnV is transformed into V-2 and (SnV-V). Annealing at 503 K destroys Si-G7 and DK1, the decay of DK1 being linked to the emergence of two new signals DK2 and DK3 from defects with S = 1/2, monoclinic-l symmetry, and two equivalent tin nuclei each, which we identify as (SnV-VSn)(-) and (Sn2V-V)(-). The structures of the tin-divacancy complexes are discussed in terms of modifications imposed on the basic divacancy structure by the larger size and lower ionization potential of the tin atom as compared to silicon. A model is proposed for the migration of (SnV-V) in the lattice at 500 K, indicated by the process (SnV-V)+Sn-->(SnV-VSn).
引用
收藏
页码:2657 / 2671
页数:15
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