Sb-doping effects on optical and electrical parameters of SnO2 films

被引:65
作者
Shokr, EK [1 ]
Wakkad, MM [1 ]
Abd El-Ghanny, HA [1 ]
Ali, HM [1 ]
机构
[1] Fac Sci, Dept Phys, Sohag, Egypt
关键词
Sb-Sn-O films; microstructure;
D O I
10.1016/S0022-3697(99)00234-6
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Undoped and Sb-doped SnO2 films similar to 100 nm thick have been deposited by electron beam evaporation from bulk samples prepared using sintering technique. Either undoped or Sb-doped SnO2 films are nearly amorphous, resistive and transparent. With increasing Sb content, the resistivity slightly decreases and then increases with further addition of Sb. which acts as donor and/or acceptor impurity atom in the SnO2 lattice, respectively. Besides, the doping of Sb inside the SnO2 lattice was associated with the increase in the film transmission at solar maximum wavelength and the width of optical band gap; which were interpreted in terms of the interaction between the two oxidation states of antimony, Sb3+ and Sb5+ and the increase of atomic bond energy, respectively. Moreover, the addition of Sb to the SnO2 lattice has proved to affect significantly on the refractive index, the extinction coefficient, concentration of free carriers, dielectric constant, electric carrier susceptibility and Mott's parameters, which have been explained and correlated to the film microstructure change. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:75 / 85
页数:11
相关论文
共 45 条
[21]   Optical and electrical properties of amorphous Sb-Sn-O thin films [J].
Kojima, M ;
Kato, H ;
Gatto, M .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1996, 73 (02) :277-288
[22]   Crystallization of amorphous Sb-Sn-O thin films [J].
Kojima, M ;
Kato, H ;
Gatto, M .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1996, 73 (02) :289-296
[23]   BLACKENING OF TIN OXIDE THIN-FILMS HEAVILY-DOPED WITH ANTIMONY [J].
KOJIMA, M ;
KATO, H ;
GATTO, M .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1993, 68 (02) :215-222
[24]   Microstructure and electrical properties of Sb-Sn-O thin films [J].
Kojima, M ;
Kato, H ;
Gatto, M .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 218 :230-234
[25]   ELECTRICAL-PROPERTIES OF NONSTOICHIOMETRIC TIN OXIDE-FILMS OBTAINED BY THE DC REACTIVE SPUTTERING METHOD [J].
LEJA, E ;
PISARKIEWICZ, T ;
KOLODZIEJ, A .
THIN SOLID FILMS, 1980, 67 (01) :45-48
[26]   IN2O3-(SN) AND SNO2-(F) FILMS - APPLICATION TO SOLAR-ENERGY CONVERSION .2. ELECTRICAL AND OPTICAL-PROPERTIES [J].
MANIFACIER, JC ;
SZEPESSY, L ;
BRESSE, JF ;
PEROTIN, M ;
STUCK, R .
MATERIALS RESEARCH BULLETIN, 1979, 14 (02) :163-175
[27]   FLUORINE-DOPED TIN DIOXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION [J].
MARUYAMA, T ;
TABATA, K .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :4282-4285
[28]   ELECTRICAL AND OPTICAL-PROPERTIES OF GE20SBXSE80-X THIN-FILMS [J].
MEHRA, RM ;
KUMAR, R ;
MATHUR, PC .
THIN SOLID FILMS, 1989, 170 (01) :15-26
[29]   ANALYSIS OF THE EFFECTS OF SUBSTRATE-TEMPERATURE, CONCENTRATION OF TIN CHLORIDE AND NATURE OF DOPANTS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2 FILMS [J].
MESSAD, A ;
BRUNEAUX, J ;
CACHET, H ;
FROMENT, M .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (19) :5095-5103
[30]  
Mott N. F., 1971, ELECT PROCESSES NONC