High-Performance Zinc Oxide Transistors and Circuits Fabricated by Spray Pyrolysis in Ambient Atmosphere

被引:188
作者
Bashir, Aneeqa [1 ]
Woebkenberg, Paul H. [1 ]
Smith, Jeremy [1 ]
Ball, James M. [1 ]
Adamopoulos, George [1 ]
Bradley, Donal D. C. [1 ]
Anthopoulos, Thomas D. [1 ]
机构
[1] Univ London Imperial Coll Sci Technol & Med, Dept Phys, Blackett Lab, London SW7 2BW, England
基金
英国工程与自然科学研究理事会;
关键词
THIN-FILM TRANSISTORS; ROOM-TEMPERATURE; COMPLEMENTARY CIRCUITS; ELECTRICAL-PROPERTIES; TRANSPARENT; ZNO; SEMICONDUCTORS; DEPOSITION; ELECTRONICS; NANORODS;
D O I
10.1002/adma.200803584
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The use of a simple deposition technique, namely spray pyrolysis, for the fabrication of high-mobility, low-voltage ZnO transistors and simple integrated circuits is demonstrated. The method is compatible with large-area deposition and could potentially address both the issue of manufacturing cost and high operating voltages.
引用
收藏
页码:2226 / +
页数:7
相关论文
共 40 条
[1]   Organic semiconductors for solution-processable field-effect transistors (OFETs) [J].
Allard, Sybille ;
Forster, Michael ;
Souharce, Benjamin ;
Thiem, Heiko ;
Scherf, Ullrich .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2008, 47 (22) :4070-4098
[2]   Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering [J].
Carcia, PF ;
McLean, RS ;
Reilly, MH ;
Nunes, G .
APPLIED PHYSICS LETTERS, 2003, 82 (07) :1117-1119
[3]   High-performance, spin-coated zinc tin oxide thin-film transistors [J].
Chang, Y. -J. ;
Lee, D. -H. ;
Herman, G. S. ;
Chang, C. -H. .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (05) :H135-H138
[4]   High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer [J].
Chiang, HQ ;
Wager, JF ;
Hoffman, RL ;
Jeong, J ;
Keszler, DA .
APPLIED PHYSICS LETTERS, 2005, 86 (01) :013503-1
[5]   Recent advances in ZnO transparent thin film transistors [J].
Fortunato, E ;
Barquinha, P ;
Pimentel, A ;
Gonçalves, A ;
Marques, A ;
Pereira, L ;
Martins, R .
THIN SOLID FILMS, 2005, 487 (1-2) :205-211
[6]   High field-effect mobility zinc oxide thin film transistors produced at room temperature [J].
Fortunato, E ;
Pimentel, A ;
Pereira, L ;
Gonçalves, A ;
Lavareda, G ;
Aguas, H ;
Ferreira, I ;
Carvalho, CN ;
Martins, R .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 338 :806-809
[7]   Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperature [J].
Fortunato, EMC ;
Barquinha, PMC ;
Pimentel, ACMBG ;
Gonçalves, AMF ;
Marques, AJS ;
Martins, RFP ;
Pereira, LMN .
APPLIED PHYSICS LETTERS, 2004, 85 (13) :2541-2543
[8]   SURFACE POINT-DEFECTS AND SCHOTTKY-BARRIER FORMATION ON ZNO(1010) [J].
GOPEL, W ;
BRILLSON, LJ ;
BRUCKER, CF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05) :894-898
[9]   Towards see-through displays:: Fully transparent thin-film transistors driving transparent organic light-emitting diodes [J].
Görrn, P ;
Sander, M ;
Meyer, J ;
Kröger, M ;
Becker, E ;
Johannes, HH ;
Kowalsky, W ;
Riedl, T .
ADVANCED MATERIALS, 2006, 18 (06) :738-+
[10]   ZnO-based transparent thin-film transistors [J].
Hoffman, RL ;
Norris, BJ ;
Wager, JF .
APPLIED PHYSICS LETTERS, 2003, 82 (05) :733-735