GaN-Based LEDs With AZO:Y Upper Contact

被引:20
作者
Chen, P. H. [1 ]
Lai, W. C. [1 ]
Peng, Li-Chi [1 ]
Kuo, C. H. [2 ]
Yeh, Chi-Li [2 ]
Sheu, J. K. [1 ]
Tun, C. J. [3 ]
机构
[1] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan
[2] Natl Cent Univ, Dept Opt & Photon, Jhongli 32001, Taiwan
[3] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan
关键词
AZO; AZO:Y; e-beam; light-emitting diode (LED); LIGHT-EMITTING-DIODES; P-TYPE GAN; NITRIDE-BASED LEDS; DOPED ZNO; OHMIC CONTACTS; LOW-RESISTANCE; TRANSPARENT; POWER; FILMS; OUTPUT;
D O I
10.1109/TED.2009.2033647
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the fabrication of GaN-based light-emitting diodes (LEDs) with ytterbium-doped alumina-zinc-oxide (AZO:Y) upper contact. It was found that AZO and AZO:Y are both highly transparent in the visible region with good thermal stability optically. However, it was found that AZO:Y is much more thermally stable electrically, as compared with AZO. Furthermore, it was found that the output power of GaN LEDs with AZO upper contact decreased significantly from 2.80 to 2.30 mW after 700 degrees C annealing. With the same annealing condition, it was found that output power decreased only slightly from 2.77 to 2.69 mW for the LEDs with AZO:Y upper contact.
引用
收藏
页码:134 / 139
页数:6
相关论文
共 21 条
[1]   Highly reliable nitride-based LEDs with SPS plus ITO upper contacts [J].
Chang, SJ ;
Chang, CS ;
Su, YK ;
Chuang, RW ;
Lin, YC ;
Shei, SC ;
Lo, HM ;
Lin, HY ;
Ke, JC .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2003, 39 (11) :1439-1443
[2]   Improved ESD protection by combining InGaN-GaN MQW LEDs with GaN Schottky diodes [J].
Chang, SJ ;
Chen, CH ;
Su, YK ;
Sheu, JK ;
Lai, WC ;
Tsai, JM ;
Liu, CH ;
Chen, SC .
IEEE ELECTRON DEVICE LETTERS, 2003, 24 (03) :129-131
[3]   InGaN-GaN multiquantum-well blue and green light-emitting diodes [J].
Chang, SJ ;
Lai, WC ;
Su, YK ;
Chen, JF ;
Liu, CH ;
Liaw, UH .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :278-283
[4]   High-efficiency InGaN-GaN MQW green light-emitting diodes with CART and DBR structures [J].
Chen, CH ;
Chang, SJ ;
Su, YK ;
Chi, GC ;
Sheu, JK ;
Chen, JF .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :284-288
[5]   Current crowding and optical saturation effects in GaInN/GaN light-emitting diodes grown on insulating substrates [J].
Guo, X ;
Schubert, EF .
APPLIED PHYSICS LETTERS, 2001, 78 (21) :3337-3339
[6]   Low-resistance and high-transparency Ni/indium tin oxide ohmic contacts to p-type GaN [J].
Horng, RH ;
Wuu, DS ;
Lien, YC ;
Lan, WH .
APPLIED PHYSICS LETTERS, 2001, 79 (18) :2925-2927
[7]   High-performance GaN-based light-emitting diode using high-transparency Ni/Au/Al-doped ZnO composite contacts [J].
Jung, SP ;
Ullery, D ;
Lin, CH ;
Lee, HP ;
Lim, JH ;
Hwang, DK ;
Kim, JY ;
Yang, EJ ;
Park, SJ .
APPLIED PHYSICS LETTERS, 2005, 87 (18) :1-3
[8]   Low operation voltage of nitride-based LEDs with Al-doped ZnO transparent contact layer [J].
Kuo, C. H. ;
Yeh, C. L. ;
Chen, P. H. ;
Lai, W. C. ;
Tun, C. J. ;
Sheu, J. K. ;
Chi, G. C. .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 11 (09) :H269-H271
[9]   Wavelength shift of gallium nitride light emitting diode with p-down structure [J].
Lan, WH .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2005, 52 (06) :1217-1219
[10]   Enhancing the output power of GaN-based LEDs grown on wet-etched patterned sapphire substrates [J].
Lee, Y. J. ;
Hwang, J. M. ;
Hsu, T. C. ;
Hsieh, M. H. ;
Jou, M. J. ;
Lee, B. J. ;
Lu, T. C. ;
Kuo, H. C. ;
Wang, S. C. .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (9-12) :1152-1154