Spontaneous roughening of low-coverage Si(100)-2x1:Cl surfaces:: Patch formation on submonolayer halogenated surface -: art. no. 205432

被引:8
作者
Chen, DX
Boland, JJ [1 ]
机构
[1] Trinity Coll Dublin, Dept Chem, Dublin 2, Ireland
[2] Univ N Carolina, Dept Chem, Venable & Kenan Labs, Chapel Hill, NC 27599 USA
来源
PHYSICAL REVIEW B | 2004年 / 70卷 / 20期
基金
爱尔兰科学基金会;
关键词
D O I
10.1103/PhysRevB.70.205432
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It is well established that fully halogenated Si(100) surfaces undergo spontaneous roughening upon annealing due to steric repulsions between halogen filled dimers. However, roughening has also been reported at low halogen coverages where steric effects are unexpected. Here we demonstrate that surface roughing shows a hyperlinear correlation with coverage, indicating that repulsions are important even at coverages significantly below a monolayer. This behavior is attributed to a clustering phenomenon that drives halogen atoms to form surface patches despite the presence of steric interactions. A correlation between the emergence of surface patches and the onset of roughening is presented. However, a detailed model of submonlayer surface roughening is still lacking.
引用
收藏
页码:205432 / 1
页数:4
相关论文
共 15 条
[1]   Monte Carlo modeling of Si(100) roughening due to adsorbate-adsorbate repulsion [J].
Aldao, CM ;
Guidoni, SE ;
Xu, GJ ;
Nakayama, KS ;
Weaver, JH .
SURFACE SCIENCE, 2004, 551 (1-2) :143-149
[2]   Halogen etching of Si via atomic-scale processes [J].
Aldao, CM ;
Weaver, JH .
PROGRESS IN SURFACE SCIENCE, 2001, 68 (4-6) :189-230
[3]   A surface view of etching [J].
Boland, JJ ;
Weaver, JH .
PHYSICS TODAY, 1998, 51 (08) :34-40
[4]   SCANNING-TUNNELING-MICROSCOPY OF THE INTERACTION OF HYDROGEN WITH SILICON SURFACES [J].
BOLAND, JJ .
ADVANCES IN PHYSICS, 1993, 42 (02) :129-171
[5]   DETERMINATION OF DYNAMIC PARAMETERS CONTROLLING ATOMIC-SCALE ETCHING OF SI(100)-(2X1) BY CHLORINE [J].
CHANDER, M ;
GOETSCH, DA ;
ALDAO, CM ;
WEAVER, JH .
PHYSICAL REVIEW LETTERS, 1995, 74 (11) :2014-2017
[6]   Dimer-anticorrelation-induced stabilization of adsorbate clustering on the Si(100)-(2 x 1) surface [J].
Chen, DX ;
Boland, JJ .
PHYSICAL REVIEW LETTERS, 2004, 92 (09) :096103-1
[7]   Steric interaction model of roughening and vacancy reorganization on halogen-terminated Si(100)-2x1 surfaces [J].
Chen, DX ;
Boland, JJ .
PHYSICAL REVIEW B, 2003, 67 (19)
[8]   Spontaneous roughening and vacancy dynamics on Si(100)-2x1:Cl [J].
Chen, DX ;
Boland, JJ .
SURFACE SCIENCE, 2002, 518 (03) :L583-L587
[9]   Intriguing kinetics for chlorine etching of the Si(100)-(2x1) surface [J].
Dohnálek, Z ;
Nishino, H ;
Kamoshida, N ;
Yates, JT .
JOURNAL OF CHEMICAL PHYSICS, 1999, 110 (08) :4009-4012
[10]   RANDOM AND ORDERED DEFECTS ON ION-BOMBARDED SI(100)-(2X1) SURFACES [J].
FEIL, H ;
ZANDVLIET, HJW ;
TSAI, MH ;
DOW, JD ;
TSONG, IST .
PHYSICAL REVIEW LETTERS, 1992, 69 (21) :3076-3079