On the possible effects of AlGaAsSb growth parameters on the 2-DEG concentration in AlGaAsSb/InGaAs/AlGaAsSb QW's

被引:3
作者
Anwar, AFM [1 ]
Webster, RT
机构
[1] Univ Connecticut, Dept Elect & Syst Engn, Storrs, CT 06269 USA
[2] USAF, Res Lab, Sensors Directorate, Div Electromagnet Technol, Hanscom AFB, MA 01730 USA
关键词
compound semiconductors; MODFET; quantum wells; semiconductor epitaxial layers; semiconductor heterojunctions;
D O I
10.1109/16.678500
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The absence of pinchoff in the room temperature current-voltage characteristics of certain AlGaAsSb/InGaAs/AlGaAsSb-based high electron mobility transistors (HEMT's) is investigated by theoretical calculations. The room temperature pinchoff properties are strongly affected by the Al mole fraction in the buffer layer, the In mole fraction in the channel, the unintentional acceptor doping level of the lattice-matched quaternary buffer, and the quantum well width. The use of InAs as the channel material imposes strict conditions on the composition and the unintentional acceptor doping of the buffer layer. With decreasing In mole fraction, the restriction is relaxed. A higher Al mole fraction in the buffer, along with a lower In mole fraction in the channel, results in superior pinchoff characteristic and lower gate leakage.
引用
收藏
页码:1170 / 1175
页数:6
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