SURFACE-STRUCTURES OF INP AND INAS THERMALLY CLEANED IN AN ARSENIC FLUX

被引:21
作者
OHKOUCHI, S
IKOMA, N
TANAKA, I
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 03期
关键词
D O I
10.1116/1.587697
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The surface structures of InP and InAs thermally cleaned in an arsenic flux were investigated using an ultrahigh vacuum scanning tunneling microscope multichamber system equipped with a molecular beam epitaxy facility. The InP surfaces thus treated at 510-degrees-C showed In-stabilized (4X2) reconstructions which depended on the time of thermal cleaning. The surface structure of this substrate after thermal cleaning for 3 min comprised one In dimer and three missing dimers. This structure was the same as that of InAs treated under the same conditions. These In-stabilized (4X2) structures formed on both InP and InAs substrates changed to an As-stabilized (2X4) structure when the substrate temperature was lowered to below 480-degrees-C under the same arsenic pressure.
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页码:2033 / 2036
页数:4
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