EXPITAXIAL METAL-SEMICONDUCTOR STRUCTURES AND THEIR PROPERTIES

被引:40
作者
TUNG, RT
LEVI, AFJ
GIBSON, JM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.583470
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:1435 / 1443
页数:9
相关论文
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