SCHOTTKY-BARRIER HEIGHTS OF SINGLE-CRYSTAL SILICIDES ON SI(111)

被引:68
作者
TUNG, RT
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 03期
关键词
D O I
10.1116/1.582896
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:465 / 470
页数:6
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