CHARACTERIZATION OF A SELF-ALIGNED COBALT SILICIDE PROCESS

被引:91
作者
MORGAN, AE
BROADBENT, EK
DELFINO, M
COULMAN, B
SADANA, DK
机构
关键词
D O I
10.1149/1.2100597
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:925 / 935
页数:11
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