FORMATION PROCESS OF STACKING-FAULTS WITH RINGLIKE DISTRIBUTION IN CZ-SI WAFERS

被引：79

作者：

HASEBE, M ^{[1
]}

TAKEOKA, Y ^{[1
]}

SHINOYAMA, S ^{[1
]}

NAITO, S ^{[1
]}

机构：

[1] NSC ELECTRON CORP, HIKARI, YAMAGUCHI 743, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 11期

关键词：

D O I：

10.1143/JJAP.28.L1999

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1999 / L2002

页数：4

共 9 条

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