WATER-ABSORPTION AND DENSIFICATION OF PHOSPHOSILICATE GLASS-FILMS

[11] KERN W, 1976, RCA REV, V37, P55

[12] CHEMICAL VAPOR DEPOSITION OF SILICATE GLASSES FOR USE WITH SILICON DEVICES .2. FILM PROPERTIES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (04) : 568 - &

[13] Koelmans H, 1974, 12TH ANN P REL PHYS, P168

[14] LOW-PRESSURE DEPOSITION OF PHOSPHOSILICATE GLASS-FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) : 1588 - 1592

[15] INFLUENCE OF THERMAL SIO2 SURFACE CONSTITUTION ON ADHERENCE OF PHOTORESISTS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (06) : 660 - &

[16] WATER IN SILICA GLASS [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1961, 57 (08): : 1208 - &

[17] INTERACTION BETWEEN PHOSPHOSILICATE GLASS-FILMS AND WATER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (03) : 434 - 438

[18] ELECTROCHEMICAL CHARGING OF THERMAL SIO2 FILMS BY INJECTED ELECTRON CURRENTS [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) : 5654 - &

[19] PAULSON WM, 1974, 12TH ANN P REL PHYS, P172

[20] STRUCTURAL EVALUATION OF SILICON OXIDE FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (10) : 1013 - &

[11] KERN W, 1976, RCA REV, V37, P55

[12] CHEMICAL VAPOR DEPOSITION OF SILICATE GLASSES FOR USE WITH SILICON DEVICES .2. FILM PROPERTIES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (04) : 568 - &

[13] Koelmans H, 1974, 12TH ANN P REL PHYS, P168

[14] LOW-PRESSURE DEPOSITION OF PHOSPHOSILICATE GLASS-FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) : 1588 - 1592

[15] INFLUENCE OF THERMAL SIO2 SURFACE CONSTITUTION ON ADHERENCE OF PHOTORESISTS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (06) : 660 - &

[16] WATER IN SILICA GLASS [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1961, 57 (08): : 1208 - &

[17] INTERACTION BETWEEN PHOSPHOSILICATE GLASS-FILMS AND WATER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (03) : 434 - 438

[18] ELECTROCHEMICAL CHARGING OF THERMAL SIO2 FILMS BY INJECTED ELECTRON CURRENTS [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) : 5654 - &

[19] PAULSON WM, 1974, 12TH ANN P REL PHYS, P172

[20] STRUCTURAL EVALUATION OF SILICON OXIDE FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (10) : 1013 - &