ETCHING OF SIO2-FILMS BY SI IN ULTRAHIGH-VACUUM

[1] SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) : 4673 - &

[2] KINETICS OF INDUCTION PERIOD FOR NUCLEATION OF SILICON ON SI(111) SUBSTRATES AT U-H-V [J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (175): : 135 - &

[3] STUDY OF CHARGING AND DISSOCIATION OF SIO2 SURFACES BY AES [J]. SURFACE SCIENCE, 1977, 64 (01) : 209 - 223

[4] A STUDY OF NUCLEATION IN CHEMICALLY GROWN EPITAXIAL SILICON FILMS USING MOLECULAR BEAM TECHNIQUES .3. NUCLEATION RATE MEASUREMENTS AND EFFECT OF OXYGEN ON INITIAL GROWTH BEHAVIOUR [J]. PHILOSOPHICAL MAGAZINE, 1967, 15 (138): : 1167 - &

[5] EFFECT OF GROWTH TEMPERATURE ON SI MBE FILM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (04) : 703 - 708

[6] TABE M, 1980, SURF SCI, V99, pL403, DOI 10.1016/0039-6028(80)90544-0

[7] ELECTRON-IRRADIATION EFFECT IN AUGER ANALYSIS OF SIO2 [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) : 161 - 166

[8] NUCLEATION OF VAPOR DEPOSITS [J]. JOURNAL OF CHEMICAL PHYSICS, 1962, 37 (10) : 2182 - &

[9] THEORY OF THIN FILM CONDENSATION .B. SOLUTION OF SIMPLIFIED CONDENSATION EQUATION [J]. THIN SOLID FILMS, 1968, 2 (5-6) : 497 - +

[1] SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (10) : 4673 - &

[2] KINETICS OF INDUCTION PERIOD FOR NUCLEATION OF SILICON ON SI(111) SUBSTRATES AT U-H-V [J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (175): : 135 - &

[3] STUDY OF CHARGING AND DISSOCIATION OF SIO2 SURFACES BY AES [J]. SURFACE SCIENCE, 1977, 64 (01) : 209 - 223

[4] A STUDY OF NUCLEATION IN CHEMICALLY GROWN EPITAXIAL SILICON FILMS USING MOLECULAR BEAM TECHNIQUES .3. NUCLEATION RATE MEASUREMENTS AND EFFECT OF OXYGEN ON INITIAL GROWTH BEHAVIOUR [J]. PHILOSOPHICAL MAGAZINE, 1967, 15 (138): : 1167 - &

[5] EFFECT OF GROWTH TEMPERATURE ON SI MBE FILM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (04) : 703 - 708

[6] TABE M, 1980, SURF SCI, V99, pL403, DOI 10.1016/0039-6028(80)90544-0

[7] ELECTRON-IRRADIATION EFFECT IN AUGER ANALYSIS OF SIO2 [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) : 161 - 166

[8] NUCLEATION OF VAPOR DEPOSITS [J]. JOURNAL OF CHEMICAL PHYSICS, 1962, 37 (10) : 2182 - &

[9] THEORY OF THIN FILM CONDENSATION .B. SOLUTION OF SIMPLIFIED CONDENSATION EQUATION [J]. THIN SOLID FILMS, 1968, 2 (5-6) : 497 - +