OPTICAL, STRUCTURAL, ELECTRICAL AND OPTOELECTRONIC PROPERTIES OF HYDROGENATED AMORPHOUS SI1-XCX ALLOY THIN-FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING METHOD

被引：25

作者：

SAITO, N ^{[1
]}

TANAKA, N ^{[1
]}

NAKAAKI, I ^{[1
]}

机构：

[1] SHIZUOKA PREFECTURAL IND TECHNOL CTR,MAKIGAYA,SHIZUOKA 42112,JAPAN

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 38卷 / 01期

关键词：

D O I：

10.1007/BF00618724

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：37 / 43

页数：7

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