SILICON ON INSULATOR BY ION-IMPLANTATION - A DREAM OR A REALITY

被引:12
作者
PINIZZOTTO, RF
机构
关键词
D O I
10.1016/0168-583X(85)90563-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:261 / 264
页数:4
相关论文
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