共 32 条
[2]
Bendik N. T., 1971, Fizika i Tekhnika Poluprovodnikov, V5, P848
[4]
HIGH-PURITY THERMAL-TREATMENT OF SILICON
[J].
JOURNAL OF APPLIED PHYSICS,
1981, 52 (03)
:1603-1604
[5]
SURFACE CHARGE AND STRESS IN SI-SIO2 SYSTEM
[J].
SOLID-STATE ELECTRONICS,
1973, 16 (12)
:1367-1375
[9]
GENERATION OF DISLOCATIONS ON POLISHED SURFACES OF DISLOCATION FREE SILICON-WAFERS
[J].
KRISTALL UND TECHNIK-CRYSTAL RESEARCH AND TECHNOLOGY,
1980, 15 (04)
:463-469
[10]
HIGH-TEMPERATURE REAL-TIME STUDIES OF LATTICE STRAINS INDUCED BY LOCALIZED OXIDATION OF SILICON
[J].
APPLIED PHYSICS,
1980, 23 (01)
:107-112