ASPECTS OF THE CHEMISTRY OF SF6/O2 PLASMAS

被引：31

作者：

RYAN, KR

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1989年 / 9卷 / 04期

关键词：

D O I：

10.1007/BF01023915

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：483 / 496

页数：14

共 16 条

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