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GRAPHITE-STRIP-HEATER ZONE-MELTING RECRYSTALLIZATION OF SI FILMS
被引:43
作者
:
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
机构
:
来源
:
JOURNAL OF CRYSTAL GROWTH
|
1983年
/ 63卷
/ 03期
关键词
:
D O I
:
10.1016/0022-0248(83)90162-8
中图分类号
:
O7 [晶体学];
学科分类号
:
0702 ;
070205 ;
0703 ;
080501 ;
摘要
:
引用
收藏
页码:453 / 483
页数:31
相关论文
共 47 条
[11]
CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY ND-YAG LASER-HEATING
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
MIT,LINCOLN LAB,LEXINGTON,MA 02173
FAN, JCC
ZEIGER, HJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
MIT,LINCOLN LAB,LEXINGTON,MA 02173
ZEIGER, HJ
[J].
APPLIED PHYSICS LETTERS,
1975,
27
(04)
: 224
-
226
[12]
ZONE-MELTING RECRYSTALLIZATION OF 3-IN-DIAM SI FILMS ON SIO2-COATED SI SUBSTRATES
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
CHAPMAN, RL
论文数:
0
引用数:
0
h-index:
0
CHAPMAN, RL
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(02)
: 186
-
188
[13]
FAN JCC, 1980, TECHNICAL DIGEST, P845
[14]
FAN JCC, 1976, 1976 P NAT WORKSH LO, P89
[15]
FAN JCC, 1977, Patent No. 4059461
[16]
SOLIDIFICATION-FRONT MODULATION TO ENTRAIN SUBBOUNDARIES IN ZONE-MELTING RECRYSTALLIZATION OF SI ON SIO2
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
SMITH, HI
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MOUNTAIN, RW
THOMPSON, CV
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
THOMPSON, CV
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1983,
130
(05)
: 1178
-
1183
[17]
CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
GEIS, MW
FLANDERS, DC
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
FLANDERS, DC
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(01)
: 71
-
74
[18]
SILICON GRAPHOEPITAXY USING A STRIP-HEATER OVEN
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
ANTONIADIS, DA
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
MOUNTAIN, RW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1980,
37
(05)
: 454
-
456
[19]
ZONE-MELTING RECRYSTALLIZATION OF ENCAPSULATED SILICON FILMS ON SIO2 - MORPHOLOGY AND CRYSTALLOGRAPHY
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
SMITH, HI
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
TSAUR, BY
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
FAN, JCC
MABY, EW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MABY, EW
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
ANTONIADIS, DA
[J].
APPLIED PHYSICS LETTERS,
1982,
40
(02)
: 158
-
160
[20]
ZONE-MELTING RECRYSTALLIZATION OF SI FILMS WITH A MOVEABLE-STRIP-HEATER OVEN
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
SMITH, HI
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
MOUNTAIN, RW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1982,
129
(12)
: 2812
-
2818
←
1
2
3
4
5
→
共 47 条
[11]
CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY ND-YAG LASER-HEATING
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
MIT,LINCOLN LAB,LEXINGTON,MA 02173
FAN, JCC
ZEIGER, HJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
MIT,LINCOLN LAB,LEXINGTON,MA 02173
ZEIGER, HJ
[J].
APPLIED PHYSICS LETTERS,
1975,
27
(04)
: 224
-
226
[12]
ZONE-MELTING RECRYSTALLIZATION OF 3-IN-DIAM SI FILMS ON SIO2-COATED SI SUBSTRATES
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
CHAPMAN, RL
论文数:
0
引用数:
0
h-index:
0
CHAPMAN, RL
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
[J].
APPLIED PHYSICS LETTERS,
1982,
41
(02)
: 186
-
188
[13]
FAN JCC, 1980, TECHNICAL DIGEST, P845
[14]
FAN JCC, 1976, 1976 P NAT WORKSH LO, P89
[15]
FAN JCC, 1977, Patent No. 4059461
[16]
SOLIDIFICATION-FRONT MODULATION TO ENTRAIN SUBBOUNDARIES IN ZONE-MELTING RECRYSTALLIZATION OF SI ON SIO2
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
SMITH, HI
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MOUNTAIN, RW
THOMPSON, CV
论文数:
0
引用数:
0
h-index:
0
机构:
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
MIT, ELECTR RES LAB, CAMBRIDGE, MA 02139 USA
THOMPSON, CV
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1983,
130
(05)
: 1178
-
1183
[17]
CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
GEIS, MW
FLANDERS, DC
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
FLANDERS, DC
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1979,
35
(01)
: 71
-
74
[18]
SILICON GRAPHOEPITAXY USING A STRIP-HEATER OVEN
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
ANTONIADIS, DA
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
MOUNTAIN, RW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
SMITH, HI
[J].
APPLIED PHYSICS LETTERS,
1980,
37
(05)
: 454
-
456
[19]
ZONE-MELTING RECRYSTALLIZATION OF ENCAPSULATED SILICON FILMS ON SIO2 - MORPHOLOGY AND CRYSTALLOGRAPHY
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
SMITH, HI
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
TSAUR, BY
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
FAN, JCC
MABY, EW
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MABY, EW
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
ANTONIADIS, DA
[J].
APPLIED PHYSICS LETTERS,
1982,
40
(02)
: 158
-
160
[20]
ZONE-MELTING RECRYSTALLIZATION OF SI FILMS WITH A MOVEABLE-STRIP-HEATER OVEN
GEIS, MW
论文数:
0
引用数:
0
h-index:
0
GEIS, MW
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
SMITH, HI
TSAUR, BY
论文数:
0
引用数:
0
h-index:
0
TSAUR, BY
FAN, JCC
论文数:
0
引用数:
0
h-index:
0
FAN, JCC
SILVERSMITH, DJ
论文数:
0
引用数:
0
h-index:
0
SILVERSMITH, DJ
MOUNTAIN, RW
论文数:
0
引用数:
0
h-index:
0
MOUNTAIN, RW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1982,
129
(12)
: 2812
-
2818
←
1
2
3
4
5
→