CHARACTERIZATION OF PLASMA DEPOSITED HALOCARBON POLYMER-FILMS CONTAINING SMALL GOLD PARTICLES

被引：25

作者：

MARTINU, L

BIEDERMAN, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572804

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2639 / 2642

页数：4

共 25 条

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