ASSESSMENT OF PROFILE BROADENING DURING SPUTTERING

被引：16

作者：

REMMERIE, J

VANDERVORST, W

MAES, HE

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(86)90539-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：416 / 420

页数：5

共 12 条

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