HIGH-RATE HOLLOW-CATHODE AMORPHOUS-SILICON DEPOSITION

被引：8

作者：

HORWITZ, CM ^{[1
]}

MCKENZIE, DR ^{[1
]}

机构：

[1] UNIV SYDNEY, DEPT APPL PHYS, SYDNEY, NSW 2006, AUSTRALIA

来源：

APPLICATIONS OF SURFACE SCIENCE | 1985年 / 22-3卷 / MAY期

关键词：

D O I：

10.1016/0378-5963(85)90225-9

中图分类号：

学科分类号：

摘要：

引用

页码：925 / 929

页数：5

共 12 条

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[10] DC MAGNETRON GLOW-DISCHARGE AMORPHOUS-SILICON [J].

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