SPUTTERING EROSION OF STRATIFIED MEDIA AND BY TIME-DEPENDENT ION-BOMBARDMENT

被引：12

作者：

NOBES, MJ ^{[1
]}

CARTER, G ^{[1
]}

LEWIS, GW ^{[1
]}

WHITTON, JL ^{[1
]}

机构：

[1] UNIV COPENHAGEN, HC ORSTED INST, PHYS LAB 2, DK-2100 COPENHAGEN, DENMARK

来源：

VACUUM | 1983年 / 33卷 / 07期

关键词：

D O I：

10.1016/0042-207X(83)90657-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：381 / 389

页数：9

共 33 条

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[8] AN OUTLINE THEORY OF SURFACE-MORPHOLOGY DEVELOPMENT DURING RADIATION ENHANCED REACTANT GAS EROSION [J].

CARTER, G ;

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[9] THEORETICAL ASSESSMENTS OF MAJOR PHYSICAL PROCESSES INVOLVED IN THE DEPTH RESOLUTION IN SPUTTER PROFILING [J].

CARTER, G ;

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NOBES, MJ .

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[10] THE EFFECT OF INCIDENCE ANGLE ON ION-BOMBARDMENT INDUCED SURFACE-TOPOGRAPHY DEVELOPMENT ON SINGLE-CRYSTAL COPPER [J].

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