THE HETEROEPITAXY OF GE ON SI(100) BY VACUUM EVAPORATION

被引:35
作者
OHMACHI, Y
NISHIOKA, T
SHINODA, Y
机构
关键词
D O I
10.1063/1.332691
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5466 / 5469
页数:4
相关论文
共 19 条
[1]   HETEROEPITAXY OF GERMANIUM THIN-FILMS ON SILICON BY ION SPUTTERING [J].
ALEKSANDROV, LN ;
LOVYAGIN, RN ;
PCHELYAKOV, OP ;
STENIN, SI .
JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) :298-301
[2]   GROWTH OF HIGH-QUALITY EPITAXIAL GE FILMS ON (100) SI BY SPUTTER DEPOSITION [J].
BAJOR, G ;
CADIEN, KC ;
RAY, MA ;
GREENE, JE ;
VIJAYAKUMAR, PS .
APPLIED PHYSICS LETTERS, 1982, 40 (08) :696-698
[3]   HETEROEPITAXY OF GE1-XSIX ON SI BY TRANSIENT HEATING OF GE-COATED SI SUBSTRATES [J].
FAN, JCC ;
GALE, RP ;
DAVIS, FM ;
FOLEY, GH .
APPLIED PHYSICS LETTERS, 1980, 37 (11) :1024-1027
[4]   GAAS SHALLOW-HOMOJUNCTION SOLAR-CELLS ON GE-COATED SI SUBSTRATES [J].
GALE, RP ;
FAN, JCC ;
TSAUR, BY ;
TURNER, GW ;
DAVIS, FM .
ELECTRON DEVICE LETTERS, 1981, 2 (07) :169-171
[5]   HETEROEPITAXY OF A DEPOSITED AMORPHOUS-GERMANIUM LAYER ON A SILICON SUBSTRATE BY LASER ANNEALING [J].
GOLECKI, I ;
KENNEDY, EF ;
LAU, SS ;
MAYER, JW ;
TSENG, WF ;
ECKARDT, RC ;
WAGNER, RJ .
THIN SOLID FILMS, 1979, 57 (01) :L13-L15
[6]   SILICON-GERMANIUM N-P HETEROJUNCTION [J].
HAMPSHIRE, MJ ;
WRIGHT, GT .
BRITISH JOURNAL OF APPLIED PHYSICS, 1964, 15 (11) :1331-&
[7]   ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].
HASEGAWA, H ;
HARTNAGEL, HL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) :713-723
[8]   EPITAXIAL GROWTH OF GE LAYERS ON SI SUBSTRATES BY VACUUM EVAPORATION [J].
ITO, K ;
TAKAHASHI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1968, 7 (08) :821-+
[9]   Epitaxial Growth Behavior of Ge on Si {111} Surfaces [J].
Krause, G. O. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1970, 3 (04) :907-911
[10]   EPITAXIAL-GROWTH OF GE ON LESS-THAN-100 GREATER-THAN SI BY A SIMPLE CHEMICAL VAPOR-DEPOSITION TECHNIQUE [J].
KUECH, TF ;
MAENPAA, M ;
LAU, SS .
APPLIED PHYSICS LETTERS, 1981, 39 (03) :245-247