P+-ALINAS/INP JUNCTION FETS BY SELECTIVE MOLECULAR-BEAM EPITAXY

被引:1
作者
WOODHOUSE, JD
DONNELLY, JP
MANFRA, MJ
BAILEY, RJ
机构
关键词
D O I
10.1109/55.9289
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:601 / 603
页数:3
相关论文
共 13 条
[1]   FULLY ION-IMPLANTED INP JUNCTION FETS [J].
BOOS, JB ;
DIETRICH, HB ;
WENG, TH ;
SLEGER, KJ ;
BINARI, SC ;
HENRY, RL .
ELECTRON DEVICE LETTERS, 1982, 3 (09) :256-258
[2]   PLANAR FULLY ION-IMPLANTED INP POWER JUNCTION FETS [J].
BOOS, JB ;
BINARI, SC ;
KELNER, G ;
THOMPSON, PE ;
WENG, TH ;
PAPANICOLAOU, NA ;
HENRY, RL .
IEEE ELECTRON DEVICE LETTERS, 1984, 5 (07) :273-276
[3]  
BOOS JB, 1983, DEC IEDM, P625
[4]  
CHENG CL, 1987, IEEE ELECTR DEVICE L, V8, P483, DOI 10.1109/EDL.1987.26702
[5]   ION-IMPLANTED N-TYPE AND P-TYPE LAYERS IN INPA [J].
DONNELLY, JP ;
HURWITZ, CE .
APPLIED PHYSICS LETTERS, 1977, 31 (07) :418-420
[6]   SELF-ALIGNED DIFFUSION TECHNIQUE FOR N-INP JFETS [J].
FAN, C ;
YU, PKL .
ELECTRONICS LETTERS, 1987, 23 (19) :981-982
[7]   INXAL1-XAS/INP HETEROJUNCTION INSULATED GATE FIELD-EFFECT TRANSISTORS (HIGFETS) [J].
HANSON, CM ;
CHU, P ;
WIEDER, HH ;
CLAWSON, AR .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (02) :53-54
[8]   A LOW-POWER HIGH-SPEED ION-IMPLANTED JFET FOR INP-BASED MONOLITHIC OPTOELECTRONIC ICS [J].
KIM, SJ ;
WANG, KW ;
VELLACOLEIRO, GP ;
LUTZE, JW ;
OTA, Y ;
GUTH, G .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (11) :518-520
[9]   THE EFFECT OF INTERFACIAL TRAPS ON THE STABILITY OF INSULATED GATE DEVICES ON INP [J].
LILE, DL ;
TAYLOR, MJ .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) :260-267
[10]   INDIRECT PLASMA DEPOSITION OF SILICON DIOXIDE [J].
MEINERS, LG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :655-658