ALUMINUM DEPOSITION ON LOW-TEMPERATURE GAAS

被引:11
作者
KELLY, MK
TACHE, N
MARGARITONDO, G
KAHN, A
机构
[1] UNIV WISCONSIN MADISON,DEPT PHYS,STOUGHTON,WI 53589
[2] PRINCETON UNIV,DEPT ELECT ENGN,PRINCETON,NJ 08544
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573996
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:882 / 883
页数:2
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